ZHANG, M. Influence of Distribution Size of Micro Energy Director Array on Ultrasonic Precise Sealing of Polymer MEMS Device. CONVERTER, [S. l.], p. 50 - 58, 2021. DOI: 10.17762/converter.35. Disponível em: https://converter-magazine.info/index.php/converter/article/view/35. Acesso em: 2 may. 2024.